Precise Blaze Angle Adjustment of Echelle Grating by Self-Shadowing Rotating Mask
Angular precision of 0.1° for the blaze angle of echelle gratings is an important technical requirement for spectral instruments with echelle gratings.This paper proposes a precise adjustment method for the blaze angle of echelle gratings that are etched or deposited by self-shadowing rotating mask.The blaze angle will decrease or increase w